Tóm tắt:

Modeling and simulation of MEMS devices is important part of whole process of their creation and fabrication. Knowledge of mechanical, electrical and thermal phenomena and their mathematical background is nowadays well supported with simulation and CAD tools. These tools used with highly developing High Performance Computing Systems are great environments for numerical calculation highly-detailed device models. Among many such tools family, Matlab/SIMULINK environment supported with various functional toolboxes is very easy and comfortable to use. The aim of this research work is to present possibility to implement electrical equivalent model of MEMS accelerometer in MATLAB/SIMULINK environment, present results of simulation and compare to mechanical model.